EFFECT OF TEMPERATURE ON THE STRAIN SENSITIVITY OF MANGANESE-COMPENSATED SILICON
DOI:
https://doi.org/10.37547/ajast/Volume04Issue11-03Keywords:
Semiconductors, strain gauge, deep levelsAbstract
In this paper, the strain gauge response of manganese-doped silicon is studied as a function of manganese concentration, ranging from 1×10¹² cm⁻³ to 1×10¹⁵ cm⁻³, at different temperatures. Mathematical modeling is performed, including calculations and plotting of graphs illustrating how the strain gauge response depends on manganese concentration and temperature.
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Zhang X., Li Y. Effect of Compensation on Piezoresistance in Silicon // Journal of Semiconductor Science and Technology. — 2015. — Vol. 30. - No. 5. - P. 055012.
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